DS Series Dry Screw Vacuum Pump Features
Exhaust Path Is Short, Reduce The Deposition Of Reactants.
- Comparing with other types of dry vacuum pump,DENAIR screw vacuum pump has the shortest gas path in the vacuum pump and that could reduce the contamination of process gas. Screw rotors can play as a powder transmission mechanism,we runs well even there has lots of contamination inside the pump.
The Optimal Linear Sealing, The Pump Performance
- Patented rotor profile can provide rotor excellent sealing effects thus a larger clearance is allowable in between.Pump rotor wesring and rotor jam by the process contamination can be reduced by larger allowable clearcance.
Simple Structure, Low Fault Rate And Easy Maintenance
- Screw type vacuum is composed by a pair of screw rotor and isolation plates are required in different between rotors and isolation plates can also be avoided.Overhaul Hanbell dry pump is much easier than other type of dry pump,so the erpair time is shorter and the cost is saver.
Microcomputer Operation, Remote Monitoring, Considerate Protection
- Microprocessor controller provides lots of pump parameters for running status monitoring.Pump can be easily operated and monitored by the operation panel.Remote control software can help the customer monitor the pump running status remotely.
DS Series Dry Screw Vacuum Pump Performance Advantages:
- Special cooling liquid cooling, to avoid the cooling water may cause corrosion to the hull.
- Mobile operation interface, convenient operation; Display and the actual work of vacuum pump and can be selected to both languages, according to the real close to the customer.
- Catch the power connector, safe and convenient.
- The nitrogen gas heater, make the vacuum pump is more suitable for CVD, PECVD and other semiconductor technique process.
- The control signals and communication signal interface, remote monitoring was carried out on the vacuum
DS Series Dry Screw Vacuum Pump Performance Curve
DS Series Dry Screw Vacuum Pump Application:
Technical Parameter Of DENAIR Rotary Screw Vacuum Pump
- The health care industry.
- Lighting industry.
- A variety of analytical instruments.
- Electronics, semiconductor industry.
- The power industry.
- Refrigeration industry.
*) Specifications are subject to change without prior noticeDENAIR CertificatesDENAIR Factory
|Model ||Unit ||PS80 ||PS160||PS180|
|Pumping Speed (50HZ/60HZ) ||L/min ||1300/1600||2150/2600||2500/3000|
|Ultimate Pressure ||Torr ||≤7.5*10-3|
|Pa ||≤ 1|
|Motor ||Frequency ||HZ ||50/60|
|Voltage ||V ||220~440|
|Power ||Hp ||4||6||6|
|Connection||Inlet || ||NW50|
|Outlet || ||NW40|
|Cooling Water ||Flow ||L/min ||3~7 |
|Pressure ||kg/cm² ||2~4|
|Temperature ||ºc ||18~30|
|Connection || ||RC3/8"|
|N2||Pressure ||Mpa ||0.15~0.2|
|Dilute Flow ||L/min ||0~60|
|Sealing Flow ||L/min ||0~20|
|Connection || ||Swagelok 1/4"|
|Weight ||kg ||280||300||320|
|Noise ||Db(A) ||<68||<70||<70|
|Interface || ||SEMI E73-0299 |
|Pump Leak Rate||Mbar.l/s ||1*10-5|
|Operation Temp.||ºc ||5°C-40°C|
|Operation Moisture ||RH ||Above 90%|
DENAIR International Trading Team
DENAIR Hannover Messe 2017
FAQQ1: Are you factory or trade company?
A1: We are factory.
Q2: What the exactly address of your factory?
A2: NO.10, Xinhao Road,Jinshan District ,Shanghai City, China.
Q3: Warranty terms of your machine?
A3: Two years warranty for the machine and technical support according to your needs.
Q4: Will you provide some spare parts of the machines?
A4: Yes, of course.
Q5: How long will you take to arrange production?
A5: 380V 50HZ we can delivery the goods within 10 days. Other electricity or other color we will delivery within 22 days
Q6: Can you accept OEM orders?
A6: Yes, with professional design team, OEM orders are highly welcome.Contact DENAIRCompany Name: Shanghai Denair Compressor Co., Ltd